采用磁控溅射方法在侧边抛磨的光纤光栅（D型光纤光栅）上溅射40 nm WO3Pd复合薄膜，制作了D型光纤光栅氢气传感器.40 nm WO3Pd复合薄膜是由5 nm的WO3、5 nm的WO3/Pd混合膜和30 nm的Pd 薄膜组成.实验中,首先采用射频溅射技术向D型光纤光栅溅射5 nm WO3薄膜，再利用共溅射技术溅射5 nm WO3/Pd混合膜，最后用直流溅射技术溅射30 nm的Pd薄膜.SEM结果显示在多次通氢气后WO3Pd薄膜仍然具有较好的表面形貌，这说明WO3Pd复合薄膜具有较好的机械性能.实验结果表明:该氢气传感器具有较好的重复性，同镀有同样氢气敏感膜的普通FBG相比，D型光纤光栅的灵敏度提高了200%;在氢气体积浓度为6%时，D型光纤光栅传感器的波长变化为15pm.

40 nm WO3Pd composite film was sputtered on the sideface of sidepolished fiber Bragg grating (Dshaped FBG). The FBG sensing head with 40 nm WO3Pd composite film was firstly prepared by a 5 nm WO3 coating realized with radio frequency（RF）sputtering process, followed by depositing 5 nm WO3/Pd composite film, and then finished with 30 nm Pd film by directcurrent(DC) sputtering method. SEM results show that WO3Pd composite film still has good surface morphology after several cycle′s hydrogen response, which indicates WO3Pd composite film has good mechnical property. The experiment results demonstrate hydrogen sensor has good repeatability under different concentration hydrogen. Compared to standard FBG coated with same hydrogen sensitive film, the sensitivity of Dshaped FBG is increased by 200%. When the hydrogen concentration is 6% in volume, the wavelength shift of Dshaped FBG is about 15 pm. Dshaped FBG hydrogen sensor has great potential in hydrogen′s measurement.