半导体光子学与技术, 2003, 9 (2): 128, 网络出版: 2011-08-11
Measurement Method of the Thickness Uniformity for Polymer Films
Measurement Method of the Thickness Uniformity for Polymer Films
摘要
Abstract
Several methods for investigating the thickness uniformity of polymer thin films are presented as well as their measurement principles. A comparison of these experimental methods is given.The cylindrical lightwave reflection method is found to can obtain the thickness distribution along a certain direction. It is a simple and suitable method to evaluate the film thickness uniformity.
YANG Hong-liang, REN Quan, FAN Yun-zheng. Measurement Method of the Thickness Uniformity for Polymer Films[J]. 半导体光子学与技术, 2003, 9(2): 128. YANG Hong-liang, REN Quan, FAN Yun-zheng. Measurement Method of the Thickness Uniformity for Polymer Films[J]. Semiconductor Photonics and Technology, 2003, 9(2): 128.
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