半导体光子学与技术, 2003, 9 (3): 189, 网络出版: 2011-08-11
Non-contact and Automatic Measurement of 2D Size with CCD Matrix and Computer System
Non-contact and Automatic Measurement of 2D Size with CCD Matrix and Computer System
摘要
Abstract
A measurement system with the CCD matrix and computer system is designed to test the 2D size of any shape workpieces automatically. In addition, the system adopts the method of the relative measurement which increases the precision and the velocity.More importantly,the precision can t be changed with the conditions of the temperature and air pressure. The experiments show that the relative precision of 0.002 9 and the absolute precision of 2.97μm are obtained. The instrument may be used in the product line and make the testing on line possible.
ZHANG Ye, WANG Wen-sheng, GUO Yang-xue, SONG Hui-ying. Non-contact and Automatic Measurement of 2D Size with CCD Matrix and Computer System[J]. 半导体光子学与技术, 2003, 9(3): 189. ZHANG Ye, WANG Wen-sheng, GUO Yang-xue, SONG Hui-ying. Non-contact and Automatic Measurement of 2D Size with CCD Matrix and Computer System[J]. Semiconductor Photonics and Technology, 2003, 9(3): 189.
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