半导体光子学与技术, 2003, 9 (4): 230, 网络出版: 2011-08-12  

Vibration Compensation for Scanning Tunneling Microscope

Vibration Compensation for Scanning Tunneling Microscope
作者单位
State Key Lab. of Precision Measurement Technology and Instrument, Tianjin University, Tianjin 300072, CHN
摘要
Abstract
The influence of vibration is already one of main obstacles for improving the nano measuring accuracy. The techniques of anti- vibration, vibration isolation and vibration compensation become an important branch in nano measuring field.Starting with the research of sensitivity to vibration of scanning tunneling microscope(STM), the theory, techniques and realization methods of nano vibration sensor based on tunnel effect are initially investigated, followed by developing the experimental devices.The experiments of the vibration detection and vibration compensation are carried out.The experimental results show that vibration sensor based on tunnel effect is characterized by high sensitivity,good frequency characteristic and the same vibratory response characteristic consistent with STM.

LI Meng-chao, FU Xing, WEI Xiao-lei, HU Xiao-tang. Vibration Compensation for Scanning Tunneling Microscope[J]. 半导体光子学与技术, 2003, 9(4): 230. LI Meng-chao, FU Xing, WEI Xiao-lei, HU Xiao-tang. Vibration Compensation for Scanning Tunneling Microscope[J]. Semiconductor Photonics and Technology, 2003, 9(4): 230.

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