半导体光子学与技术, 2004, 10 (2): 93, 网络出版: 2011-08-15
Uniformity of Electrical Parameters on MCT Epitaxy Film
Uniformity of Electrical Parameters on MCT Epitaxy Film
摘要
Abstract
For Hall measurement under different magnetic fields at LN2temperature,Hg1-xCdxTe (MCT) film (radius 1 cm) grown on CdTe substrate by LPE is photoengraved into many small Van Der Pauw squares,then their Hall coefficients and mobilities are measured and analyzed,respectively.Two films were Hall-tested during the temperature range from LHe 4.2 K to about 200 K.An actual impression on the uniformity of electrical parameters for MCT film can obtained by means of the methods presented in this paper.
NIE Lin-ru, MENG Qing-lan, LI Nan. Uniformity of Electrical Parameters on MCT Epitaxy Film[J]. 半导体光子学与技术, 2004, 10(2): 93. NIE Lin-ru, MENG Qing-lan, LI Nan. Uniformity of Electrical Parameters on MCT Epitaxy Film[J]. Semiconductor Photonics and Technology, 2004, 10(2): 93.
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