半导体光子学与技术, 2004, 10 (3): 186, 网络出版: 2011-08-15
Microcrystalline Silicon Materials and Solar Cells Prepared by VHF-PECVD
Microcrystalline Silicon Materials and Solar Cells Prepared by VHF-PECVD
摘要
Abstract
A series of samples deposited by VHF-PECVD at different pressures were studied.The measurement results of photosensitivity (photo conductivity/dark conductivity) and activation energy indicated near the same rule with the change of the pressure.The results measured by Raman scattering spectra,X-ray diffraction and FTIR all proved the evident crystallization of the materials.Treating the p/i interface by hydrogen has a great improving effect on the performance of the microcrystalline silicon (μc-Si) p-i-n solar cells if the treatment time was appropriate. An efficiency of 4.24% forμc-Si p-i-n solar cells deposited by VHF-PECVD was firstly obtained.
ZHANG Xiao-dan, ZHU Feng, ZHAO Ying, SUN Jian, WEI Chang-chun, HOU Guo-fu, GENG Xin-hua, XIONG Shao-zhen. Microcrystalline Silicon Materials and Solar Cells Prepared by VHF-PECVD[J]. 半导体光子学与技术, 2004, 10(3): 186. ZHANG Xiao-dan, ZHU Feng, ZHAO Ying, SUN Jian, WEI Chang-chun, HOU Guo-fu, GENG Xin-hua, XIONG Shao-zhen. Microcrystalline Silicon Materials and Solar Cells Prepared by VHF-PECVD[J]. Semiconductor Photonics and Technology, 2004, 10(3): 186.
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