半导体光子学与技术, 2005, 11 (1): 32, 网络出版: 2011-08-18
Formation Mechanism of PPS as Antireflection Coating
Formation Mechanism of PPS as Antireflection Coating
摘要
Abstract
The whole chemical etching process on a P-type polycrystalline silicon substrate with resistivity 1-2Ω·cm is described. The formation mechanism of porous polycrystalline silicon(PPS) microstructure was investigated. Those how the initial pits were formed and an uniform morphology of PPS was obtained are explained. Two types of etching mechanism were characterized as defect control reaction and diffusion control reaction. The morphology formed after the isotropic acidic solution etching with different etching time and HF/HNO3concentration was compared with the effect of the same etching process after anisotropic alkaline etching. The study showed that the thickness of porous polycrystalline silicon layer with chemical acidic etching entirely depended on the existence of various types of defects.
WANG Hai-yan, SUN Xiao-feng, ZHANG Yu-xiang, LI Wei-qiang, LU Jing-xiao. Formation Mechanism of PPS as Antireflection Coating[J]. 半导体光子学与技术, 2005, 11(1): 32. WANG Hai-yan, SUN Xiao-feng, ZHANG Yu-xiang, LI Wei-qiang, LU Jing-xiao. Formation Mechanism of PPS as Antireflection Coating[J]. Semiconductor Photonics and Technology, 2005, 11(1): 32.