半导体光子学与技术, 2007, 13 (1): 25, 网络出版: 2011-08-18
Design and Fabrication of Hybrid Piezomotor Applied in Precision Positioning Devices
Design and Fabrication of Hybrid Piezomotor Applied in Precision Positioning Devices
摘要
Abstract
The motorps configuration is designed and the dynamic analysis equations based on its simplified model are deduced. A testing system utilizing grating is set up to test this new motor, and the theoretical movement principle for the motor is proved by experiments. The pulse waveforms are applied to drive the motor to move in steps. The motor has a displacement resolution of 10 nm and a maximum velocity of 0.6 mm/s. It can drive a 200 g slider whose range is 20 mm. A one-dimensional precision positioning platform is fabricated by using the new hybrid piezoelectric motor. The prototype is made up of two servomotors and two piezoelectric motors, which are controlled automatically by a computer. The positioning range of the platform is 10 cm.
CHENG Dong-ming, DUAN Zhi-yong, MA Feng-ying, GONG Qiao-xia. Design and Fabrication of Hybrid Piezomotor Applied in Precision Positioning Devices[J]. 半导体光子学与技术, 2007, 13(1): 25. CHENG Dong-ming, DUAN Zhi-yong, MA Feng-ying, GONG Qiao-xia. Design and Fabrication of Hybrid Piezomotor Applied in Precision Positioning Devices[J]. Semiconductor Photonics and Technology, 2007, 13(1): 25.
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