半导体光子学与技术, 2007, 13 (2): 108, 网络出版: 2011-08-18
Liquid-level Measurement with Fiber-optic Low Coherence Interferometer: Micrometer-resolution Approach
Liquid-level Measurement with Fiber-optic Low Coherence Interferometer: Micrometer-resolution Approach
摘要
Abstract
According to the fact that the surface of liquid with low viscosity coefficient is a good reflection plane for a broadband light beam, liquid-level measurement in micrometer resolution is designed based on a fiber-optic low coherence interferometer in Michelson configuration. The wave front of the reflected light beam is well enough to form an interferogram with a beam reflected from an optic mirror mounted on a stepping scanning-motor. The central peak of the interferogram is read as a measure of the liquid level. Experimental results show that this noncontact method can reach a resolution of±1.25μm in the measurement range of 86 mm.
YANG Yan-fang, SUN Yu-xing, SUN Chang-sen. Liquid-level Measurement with Fiber-optic Low Coherence Interferometer: Micrometer-resolution Approach[J]. 半导体光子学与技术, 2007, 13(2): 108. YANG Yan-fang, SUN Yu-xing, SUN Chang-sen. Liquid-level Measurement with Fiber-optic Low Coherence Interferometer: Micrometer-resolution Approach[J]. Semiconductor Photonics and Technology, 2007, 13(2): 108.