提出一种运用微光机电系统(micro-opto-electro-mechanical systems, MOEMS)闪耀光栅, 动态产生阿达玛变换模版的微型近红外光谱仪。 它具有体积小、 价格低、 扫描速度快等突出优点。 分析了这种新型近红外光谱仪的结构和工作原理, 通过对MOEMS闪耀光栅编程, 动态生成了63阶阿达玛模版。 实验得到的光谱波形与岛津光谱仪测量结果吻合。 检测波长范围为900～1 500 nm, 分辨率为19 nm, 单次扫描时间2.4 s, 信噪比为44.67∶1, 光路尺寸为70 mm×130 mm, 总体重量<1 kg, 符合实时、 便携的要求。

A new type micro Hadamard transform (HT) near-infrared (NIR) spectrometer is proposed in the present paper. It has a MOEMS (Micro-Opto-Electro-Mechanical Systems) blazed grating HT mask. It has merits of compactness, agility of dynamic mask generation and high scan speed. The structure and theory of this spectrometer are analyzed. The 63-order Hadamard-S matrix and mask are designed. The mask is dynamically generated by program of MOEMS blazed gratings. The spectrum is in agreement with that measured by Shimadzu spectrometer in experiments. It has a wavelength range between 900 and 1 700 nm, spectral resolution of 19 nm, single scan time of 2.4 s, SNR of 44.67∶1, optical path of 70 mm×130 mm, and weight under 1 kg. It can meet the requirement of real time detection and portable application.