建立了超磁致伸缩薄膜(GMF)的磁致伸缩系数求解模型用于分析磁机耦合转化关系, 研究了模型的建立过程、推演机理及仿真结果。通过合理简化复合GMF变形, 并以单层GMF的磁致伸缩系数表达式为基础, 推演得出了复合GMF的磁致伸缩系数表达式。以具有正负磁致伸缩效应的复合GMF为研究对象, 利用推演得出的复合GMF的磁致伸缩系数表达式, 讨论了磁致伸缩镀层厚度对悬臂梁式GMF自由端挠度的影响规律。研究结果表明: 在镀层总厚度一定且正磁致伸缩材料层与负磁致伸缩材料层厚度比为2.3时, 不论是Cu基薄膜还是PI基薄膜, 其变形能力均达到最大值, 从而实现了正负复合薄膜悬臂梁的结构优化。

A model to solve the magnetostrictive coefficient of a Giant Magnetostrictive Film(GMF) was established to analyze the coupling relations of GMFs.Then,the building process, deduction mechanism and simulation results of the model were investigated. On the basis of magnetostrictive coefficient expression of a single layer GMF, the magnetostrictive coefficient expression of a composite GMF was obtained by simplifying the deformation of the composite GMF reasonablely.By taking the compound GMF with positive and negative magnetostrictive effects as the research object, the impact of magnetostrictive coating thickness on the deflection of the free end of the cantilever GMF was discussed by using the deduced magnetostrictive coefficient expression. The results show that the deformation capability for both Cu-based thin film and PI-based thin film can reach the maximum when the total thickness ratio of the positive and negative magnetostrictive material layers is 2.3,which realizes the structure optimization of positive and negative cantilevers.