本文提出一种实时测量表面粗糙度的结构简单、光路调节方便的实验系统。用双棱镜产生的两束不同方向的平面波同时照射粗糙表面,从散射光场的相关度得到表面粗糙度。结果表明,选择较小的棱镜角和入射角,可使粗糙度的测量范围达1μm～40μm;实验结果与泰勒雪夫-5型粗糙度检查仪的测试值符合得较好。

This paper proposes and discusses a new set-up for realtime measurement of surface roughness by correlation of laser speckle patterns. The rough surface is illuminated simultaneously by two plane waves which are obtained from a laser after angular spliting by a biprism. Selecting a small angle of biprism and small angle of incidence, the measurement of roughness covers a dynamic range of 1μm. Finally, the experimental results thus obtained are compared with metrologioal measurement by TALYSURF-5, the agreement of the data is well.