本文报道一种测量标准具间距的方法,其误差为λ/60.用波长连续可调的染料激光器的输出射到标准具上,借助于列阵探测元件和计算机组成的OMA系统可从干涉图形中精确测定对应波长的中心小数,在此基础上发展了剩余小数处理数据的方法,利用至少四个不同的波长可得到干涉级数的绝对值和标准具的厚度.进一步用数据拟合法可得到镀层反射相位的相对色散曲线.

We report in this paper a method of measuring the cavity spacing of a Fabry-Perot interferometer with error less than several tenth of wavelength. First the central fractional order was obtained from interference pattern by a OMA system, which consists of a diode array and a microcomputer, for 32 different wavelengths and He-Ne 6328 A line. Then by using the method of excess fractions to process data, the absolute interference order and cavity spacing of F-P interferometer was worked out from the data corresponding at least to 4 different wavelengths. Further more, the relative reflection phase dispersion curve for silver mirror was obtained by using the data fitting method.