为了提高使用长程轮廓仪对筒状超光滑非球面进行面型测量的精度，研究并总结了测量过程中常见的误差源及校正方法。针对测量过程中对结果影响较大的转台转轴与待测筒状镜光轴之间的倾斜和偏心误差做了详细的分析，提出利用数据处理校正这部分误差的方法。编写了相应的数据处理程序，通过数值模拟实验对该程序进行了验证。实验结果表明，该程序能够有效去除转台转轴与待测镜之间倾斜和偏心产生的系统误差，提高长程轮廓仪用于筒状镜面型测量时的测量精度。在转台转轴与待测镜之间具有5 μm的偏心和大约1′的倾斜时，使用该程序还原50 nm量级的面型轮廓，还原精度为均方根值(RMS)2.8 nm，峰谷值(PV)18.5 nm。

To improve the accuracy of long trace profiler for measuring the surface profile of tube-shaped super-smooth mirrors, some common errors and correcting methods are studied and summed up. The errors caused by the tilt and decenter between the rotating axis of rotary table and the axis of tube-shaped mirror under test during measurement will influence the result very much. These errors are in detail analyzed, and a correction method through data processing is presented. Then, a data processing code is programmed, and a numerical-simulation experiment is given to decide the properties of the code. Experimental results indicate that the code can remove the tilt and decenter errors between rotary table and mirror under test effectively, and improve the accuracy of tube-shaped mirror measurement using long trace profiler. When there is 5 μm decenter and 1′ tilt between the rotary table and mirror under test, using the code to restore the surface profile at the order of 50 nm, the restoration accuracy is root-mean-square (RMS) 2.8 nm and peak-to-valley (PV) 18.5 nm.