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高精度干涉仪镜头支撑结构的光机集成分析

Integrated Opto-mechanical Analysis for the Lens of High-precision Interferometer Support Structure

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摘要

根据高精度干涉仪镜头的工作状况,给出了平放时镜头的装卡方式。用 Ansys Workbench有限元分析软件对镜头由重力、支撑结构所导致的面形变化进行仿真分析,在对光机结构进行有限元分析的基础上,反复优化镜头机械结构设计,从而使支撑结构引起的系统误差降到最低,以 Zernike多项式为接口工具拟合镜面变形,评估了该支撑结构对镜头光学性能的影响。分析结果表明,在该支撑方式下,干涉仪镜头引入的波像差的均方根值 RMS<1/50λ,满足像质要求。

Abstract

A horizontal placing method for the lens of high-precision interferometer is given according to its operating mode. Using Ansys Workbench finite element software, simulation and analysis are carried out on the deformation of mirror surface which is caused by gravity and the support structure. Based on the Finite Element Analysis (FEA) for opto-mechanical structure, optimize the mechanical design of the lens repeatedly, so that the systematic errors caused by support structure get to minimization. Fit deformed mirror surface with Zernike polynomial as an interface tool, and evaluate the effect of support structure on optical performance. The analysis results show that the RMS of aberration of the interferometer lens is less than 1/50λ which can be fulfilled with the image quality demand under the support method.

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中图分类号:TP211+.6

DOI:10.3969/j.issn.1003-501x.2011.10.024

所属栏目:先进光学制造技术

收稿日期:2011-08-05

修改稿日期:2011-09-15

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作者单位    点击查看

张娟:中国科学院光电技术研究所,成都 610209
吴永前:中国科学院光电技术研究所,成都 610209
伍凡:中国科学院光电技术研究所,成都 610209
吴高峰:中国科学院光电技术研究所,成都 610209

联系人作者:张娟(zhjwu8080@163.com)

备注:张娟(1982-),女(汉族),陕西榆林人。硕士研究生,主要研究工作是光机结构设计及有限元分析。

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引用该论文

ZHANG Juan,WU Yong-qian,WU Fan,WU Gao-feng. Integrated Opto-mechanical Analysis for the Lens of High-precision Interferometer Support Structure[J]. Opto-Electronic Engineering, 2011, 38(10): 146-150

张娟,吴永前,伍凡,吴高峰. 高精度干涉仪镜头支撑结构的光机集成分析[J]. 光电工程, 2011, 38(10): 146-150

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