针对相移式反射数字全息显微成像技术，在分析、比较现有的几种相移式反射数字全息装置的基础上，提出了一种基于改进型的Linnik干涉仪的相移式反射数字全息显微装置。这种改进型的Linnik干涉仪装置可以实现更高相移精度，能大大改善显微再现像的质量。为了证明该装置的可行性，利用该装置，在实验上实现了USAF-1951分辨率板的表面结构的三维显微成像，获得了清晰、放大的物光波振幅和相位分布。

An improved Linnik interferometer for phase-shifting digital holographic microscopy in reflection configuration is demonstrated. Some phase-shifting configurations which have been used are analyzed and compared. Higher phase-shifting precision can be achieved in this improved Linnik interferometer, so the microscopic imaging quality can be improved. In experiment, to prove its feasibility, the 3D microscopic imaging of the USAF-1951 target surface structure has been realized, the amplitude and phase distributions of object wave are reconstructed.