激光与光电子学进展, 2012, 49 (1): 012203, 网络出版: 2011-11-02
方口径压电薄膜变形镜夹持应力控制研究
Position-Setting Stress Control of the Square-Aperture Piezoelectricity Film Deformable Mirror
自适应光学 压电薄膜变形镜 夹持方式 有限元方法 adaptive optics piezoelectricity film deformable mirror position-setting manner finite element method
摘要
基于有限元方法，以三点夹持为例，对压电薄膜变形镜(PFDM)的工作特性进行了仿真分析，发现变形镜与镜框之间因夹持带来的接触应力会导致镜面变形与电压之间呈现非线性变化。针对这一问题，提出了两种改进方式，仿真结果表明，两种改进方式均能够有效改善变形镜的非线性响应问题。
Abstract
Based on finite element method, simulation about the property of piezoelectricity film deformable mirror (PFDM) under three-point position-setting is done. The results show that the contact between mirror and frame can cause nonlinear response. For solving this problem, two methods are proposed. Simulation results show that both of them can weaken the nonlinear response.
王德恩, 代万俊, 张军伟, 胡东霞, 李小群. 方口径压电薄膜变形镜夹持应力控制研究[J]. 激光与光电子学进展, 2012, 49(1): 012203. Wang Deen, Dai Wanjun, Zhang Junwei, Hu Dongxia, Li Xiaoqun. Position-Setting Stress Control of the Square-Aperture Piezoelectricity Film Deformable Mirror[J]. Laser & Optoelectronics Progress, 2012, 49(1): 012203.
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