为了研究微光机电系统的元器件——微角反射器的制作理论和过程，采用自组装方法设计制作角反射器，通过光刻和选择性蚀刻确定角反射器图案，当把牺牲层腐蚀掉后，由晶格失配双层结构形成的铰链在应力驱动下带动镜面发生旋转并最终达到平衡位置，从而完成自组装制作过程。采用适于求解弹性应力几何非线性问题的有限元方法进行了计算分析，并仿真得到不同角度的微反射镜和微立方箱。通过分别调整镜面和铰链尺寸、应变双层厚度和上盖层厚度，仿真分析了镜面的线度、角度和平整度对旋转角度的影响。结果表明，自组装方法是制作微光机电系统中3维微/纳米元器件的一种非常有效的方法，具有很好的发展前景。

In order to study the fabricating process and the theory of the micro opto-electronic mechanical system(MOEMS)corner-cube reflector(CCR), the self-assembly method was used. The principle of self-assembly method fabricating MOEMS CCR was introduced. First, the shape of hinge can be patterned by lithography and the region of CCR plane was selectively etched. Secondly, using selective etching solutions, the sacrificial layer was exposed. Thirdly, after the sacrificial layer was etched, the CCR was self-assembled through the hinge drive the mirror bending up under the driven stress until reach an equilibrium position, which the driven stress was created by the lattice mismatch between the bilayer. Because finite element method was suitable to solve the nonlinear problems of elastic stress, it was applied to analysis and models the CCR, mirrors with different angels and a micro-cube box were also successfully simulated. Furthermore, by adjusting the size of mirror and hinge, the thickness of the strain bilayer and the top layer, which affect the rotation angle of the mirror, simulation analysis was carried out. It was shown that the self-assembly method was one of very feasible method for fabricating 3-D micro/nano structures and had a good prospect of application.