辉光放电原子发射光谱仪可用于物质表面化学成分随深度分布的分析， 在镀层分析、 金属材料检验等领域有着广泛的应用。 文章介绍了辉光深度分析的传统方法和局限性以及实时深度测量技术的近期研究， 提出了一种用于辉光放电光谱深度分析的激光实时测量新方法。 文章采用激光位移传感器和根据激光测量方法设计的辉光放电光源构成实时深度测量系统， 详细阐述了系统的设计方案和技术原理。 系统的设计结构能够实现在辉光光谱分析的同时进行激光实时溅射深度的测量。 通过实验验证和分析了激光实时测量样品溅射深度过程中产生的光源位移现象。 采用双激光器实时深度测量系统对锌合金标准样品进行了溅射深度的实时测量， 给出了实时深度测量曲线。 通过将溅射面测量曲线与参考面曲线进行叠加， 得到了样品溅射坑深度的实际值， 与Dektak8型表面形貌仪测量结果一致。

This paper presents the traditional methods of GD depth analysis method and also its limitations, and the earlier studies of real-time depth measurement technology. A new method of real-time depth determination by laser technology for GD-OES depth analysis is proposed. The real-time depth measurement system is composed of laser displacement sensor and new designed Grimm-type GD source based on laser measurement method, and the system design and technical principles are described in detail. Sputtering depth measurement signal and element spectrum signal can be synchronously collected by this system. The displacement phenomenon of glow discharge source during real-time sputtering depth measurement process is analyzed. The real-time sputtering depth measurement curve of zinc alloy standard sample was tested by two laser displacement sensors measurement system. The actual value of sputtering depth was obtained by adding the depth measurement curve of sputtering surface and the reference plane curve, and the actual depth result is in line with Dektak8-type surface profilometer.