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离子束抛光工艺中驻留时间的综合算法

Dwell time algorithm of synthesis for ion beam polishing

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摘要

在离子束抛光工艺中,驻留时间的求解是很关键的。通常求解驻留时间的时候,是用理想的高斯函数来近似实际的加工函数。如果使用实际的加工函数仿真加工,加工的效果不好。运用系数法和消去法的综合算法来提高采用实际加工函数仿真加工镜面面型的精度,首先多次用系数法得到比较理想且平滑的镜面面型,然后再用消去法精修面型。这种算法运算速度快,得到的面型精度高且较平滑。对这种综合算法进行仿真分析,比较了理想高斯函数与实际加工函数加工后的差别,同时比较了运用消去算法与综合算法得到的镜面面型,PV值由83.63 nm减小到46.92 nm,镜面精度提高了很多。

Abstract

In the process of ion beam polishing, the determination of dwell time is very crucial. Usually the ideal Gauss function is used to approximate the practical processing function. If the practical processing function is used to simulate processing, the result of processing is not satis-facotry. A synthesis algorithm of coefficient method and elimination method is proposed to improve the accuracy of mirror face when the practical processing function is adopted to simulate processing. Firstly, it uses the coefficient method iteratively to get a smooth mirror face, and then uses the elimination method to improve the accuracy. This algorithm runs faster, and works out a smooth mirror face with high accuracy. The synthesis algorithm is simulated, the results between the ideal Gauss function and the practical processing function are compared, as well as the mirror faces obtained by elimination method and synthesis method. The simulation results show that, compared with the 83.36 nm PV value of the practical processing function without the synthesis algorithm, the one with the synthesis algorithm is decreased to 46.92 nm, and the accuracy of mirror face is improved.

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中图分类号:TN205;TP391.7

基金项目:国家自然科学基金仪器专项项目(10827302)

收稿日期:2011-01-12

修改稿日期:2011-03-07

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郭伟远:中国科学院国家天文台 南京天文光学技术研究所, 江苏 南京 210042中国科学院天文光学技术重点实验室, 江苏 南京 210042
成贤锴:中国科学院国家天文台 南京天文光学技术研究所, 江苏 南京 210042中国科学院 研究生院, 北京 100039
梁斌:中国科学院国家天文台 南京天文光学技术研究所, 江苏 南京 210042中国科学院天文光学技术重点实验室, 江苏 南京 210042

联系人作者:郭伟远(wyguo@niaot.ac.cn)

备注:郭伟远(1951-),男,山东东营人,研究员,主要从事真空镀膜和精密光学加工方面的研究工作。

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引用该论文

GUO Wei-yuan,CHENG Xian-kai,LIANG Bin. Dwell time algorithm of synthesis for ion beam polishing[J]. Journal of Applied Optics, 2011, 32(5): 888-893

郭伟远,成贤锴,梁斌. 离子束抛光工艺中驻留时间的综合算法[J]. 应用光学, 2011, 32(5): 888-893

被引情况

【1】郭伟远,成贤锴. 极坐标系统下进行直角坐标扫描的离子束抛光. 应用光学, 2012, 33(1): 164-169

【2】邓文辉,唐才学,陈贤华,王健,钟波. 离子束抛光轨迹段划分及进给速度求解. 强激光与粒子束, 2013, 25(12): 3292-3296

【3】李宁,尹自强,田富竟. 光学面形的轮带光学抛光方法研究. 应用光学, 2014, 35(1): 116-121

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