基于微通道板(microchannel plates, MCP)高性能与绿色制造的要求，探索铅玻璃微通道板(lead silicate glass microchannel plates, LSG-MCP)的替代材料已成为MCP研究的热点。近20年来，以硅为替代材料的微通道板研究取得显著进展，并成为最具应用前景的微通道板类型之一。综述了硅微通道板(Si-MCP)的研究进展，主要概述Si-MCP的基底材料、制备技术、性能和应用领域，尤其是微孔阵列及其内壁表面功能层的成形技术。并将其与传统LSG-MCP比较，分析了Si-MCP制备技术与性能的优劣。最后，展望了Si-MCP的进一步发展方向。

Based on the demands for high performance and green manufacture of microchannel plates (MCP), the development of alternative material to replace lead silicate glass MCP (LSG-MCP) has been intensively investigated. In the past 20 years, silicon MCP has achieved significant progress and become one of the most promising MCPs. The research progress on Si-MCP is summarized in substrate material, preparation, performance and application. The preparation of microporous array, the preparation principle and method of functional layer of microporous inner wall are discussed. Compared with the conventional LSG-MCP, the advantages and disadvantages of Si-MCP in preparation and performance were analyzed. Finally, the prospect of Si-MCP is presented for further development.