光学技术, 2011, 37 (6): 664, 网络出版: 2011-12-01
一种离轴凸双曲面单修加工及检测方法的研究
Research on unit manufacture and test of an off-axis convex hyperboloidal mirror
应用光学 离轴凸双曲面 单修加工 偏转角度 离轴Hindle球 检测 applied optics off-axis convex hyperboloidal mirror unit manufacture deflection angle off-axis Hindle ball test
摘要
离轴凸双曲面的加工和检测是非球面加工检测中的一个比较困难的问题。结合一块口径φ230mm、离轴量226mm的凸双曲面镜, 提出了离轴凸双曲面镜单修加工以及采用离轴Hindle球检测偏转角度的离轴凸双曲面镜这一方案。给出了单修加工工艺, 并解决了检测光路的搭建难点。加工完成的离轴凸双曲面的面形精度RMS优于λ/50(λ=632.8nm)。结果表明此方案是可行的, 具有重要的现实意义。
Abstract
It’s very difficult for manufacture and test of an off-axis convex hyperboloidal surface in the area of manufacture and test of aspherical optical surfaces. With the diameter of an off-axis convex hyperboloidal mirror is 230mm and off-axis magnitude is 226mm, a new method in which the off-axis convex hyperboloidal mirror is manufactured singly and tested with a deflection angle using an off-axis Hindle ball is proposed. Besides, unit manufacture technology is given and problems in building test configuration are solved. RMS of the off-axis convex hyperboloidal surface manufactured is better than λ/50(λ=632.8nm) . The result shows that the new method is feasible and has an important significance.
沈世东, 余俊, 潘俊鹤, 胡明勇. 一种离轴凸双曲面单修加工及检测方法的研究[J]. 光学技术, 2011, 37(6): 664. SHEN Shidong, YU Jun, PAN Junhe, HU Mingyong. Research on unit manufacture and test of an off-axis convex hyperboloidal mirror[J]. Optical Technique, 2011, 37(6): 664.