针对目前高速扫描型原子力显微镜(AFM)主要是限于物检测且扫描速度和扫描范围均有待提高，提出了一种高速原子力显微镜结构设计方案。在压电陶瓷致动器驱动的柔性铰链结构式位移台的基础上，构建了AFM大范围扫描器，使原子力显微镜在x-y扫描方向的运动范围达到了100 μm×100 μm。通过傅里叶频谱分析，计算获得了AFM扫描器常用的三角波驱动信号和正弦波驱动信号的高次谐波特性及其对AFM高速扫描成像的影响程度。为了消除在扫描运动过程中的机械自激振荡，提出了将正弦波信号作为高速扫描的驱动信号,行扫速度达到50 line/s。在正弦波驱动的基础上提出了一种基于位置采样的图像获取方法，有效地减小了AFM扫描器的非线性误差造成的图像畸变现象。

As current high-speed scanning Atomic Force Microscope (AFM) is mainly designed for the biological imaging application and its scanning speed and scanning range should be improved, a novel high speed AFM was designed. Based on the flexure guide structure driven by piezo actuators, the AFM scanner with a large range was proposed, by which the AFM scanning range is expanded to 100 μm×100 μm in the x-y directions. By the Fourier expansion, the high harmonic characteristics of the common triangle and sinusoidal driving signals were analyzed, and their effects on the high speed scanning image were discussed. To avoid the mechanical self-oscillation of the stage during scanning, the sinusoidal driving signal was taken to drive the high speed scanning and the line-scan speed was up to 50 line/s. Finally, a new method to eliminate AFM nonlinearity error based on positioning sampling was designed. This method effectively reduces the image distortion resulted from nonlinear errors of the AFM scanner.