采用直径为300 μm的激光光斑对TiN涂层表面进行微尺度激光喷丸强化处理以进一步提高TiN涂层的表面性能。利用光学轮廓仪和纳米力学测试系统测量了不同激光工艺参数作用下TiN涂层喷丸区域的表面形貌、纳米硬度及弹性模量分布。结果表明，喷丸区域形成的圆锥形凹坑最大深度约为12 μm，纳米硬度和弹性模量在喷丸中心处变化最大，并在一定范围内随着激光能量的增大而增大，当激光能量为250 mJ时，两者最大，分别达到5021 GPa和4028 GPa，与初始状态相比分别提高了140%和439%。

A TiN coating was modificated by microscale Laser Shock Peening (μLSP) based on the laser spot with a diameter of 300 μm to further improve its surface properties. An optical profiler and a nanomechanical test system were used to observe and measure the surface morphology, nano-hardness and the elastic modulus of the TiN coating in a peening area with different μLSP parameters. Experimental results show that a conical dent is formed in the peening area after μLSP, and the biggest depth is about 1.2 μm. The nano-hardness and elastic modulus are significantly changed in the center of peening area, and they are enhanced with the increase of laser energy in a certain range. When the laser energy is 250 mJ, both the nano-hardness and elastic modulus reach the maximum, which are 50.21 GPa and 402.8 GPa, respectively. Compared with the initial state of the TiN coating, they have been increased by 140% and 43.9%,respectively.