Chinese Optics Letters, 2012, 10 (4): 041601, Published Online: Dec. 15, 2011
Low-loss amorphous Si waveguides with gradient refractive index cladding structure 
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160.4670 Optical materials 230.7370 Waveguides 290.5880 Scattering, rough surfaces 310.6860 Thin films, optical properties
Abstract
Amorphous Si waveguides with gradient refractive index cladding structure are proposed and fabricated using plasma-enhanced chemical vapor deposition method. Compared with 6 dB/cm for ridge waveguide without gradient cladding, the propagation loss of the gradient cladding waveguides is less than 1 dB/cm with both TE and TM polarizations.
Weibin Qiu, Jiaxian Wang. Low-loss amorphous Si waveguides with gradient refractive index cladding structure[J]. Chinese Optics Letters, 2012, 10(4): 041601.
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