针对近红外光谱仪由于红外CCD导致的红外光谱仪高成本问题， 提出用MOEMS微镜阵列进行光路结构改进， 并且解决了红外光谱仪成像像斑不规则从而难以采用MOEMS微镜阵列进行光谱扫描的问题， 设计了一种新的分光成像结构。 该结构基于全息凹面光栅理论来规则光谱成像的像斑， 采用光学设计软件ZEMAX和针对特定像差评判标准的优化算法， 按照像斑规则化的要求设计并优化了光路结构。 该光路结构中的平场全息凹面光栅工作波长范围为900~1 400 nm。 对设计结果分析表明： 在宽度为50 μm缝光源情况下， 分光系统的理论分辨率优于6 nm， 像斑的可用尺寸约为0.042 mm×0.08 mm。 验证实例表明， 该设计满足了像斑规则化的要求， 可以使用MOEMS微镜进行光谱反射扫描， 验证了新型实用化MOEMS微镜阵列光谱仪模型的可行性， 在最后对探测器所处位置与微镜最大偏转角的关系进行了分析。

A method which uses MOEMS mirror array optical structure to reduce the high cost of infrared spectrometer is given in the present paper. This method resolved the problem that MOEMS mirror array can not be used in simple infrared spectrometer because the problem of imaging irregularity in infrared spectroscopy and a new structure for spectral imaging was designed. According to the requirements of imaging spot, this method used optical design software ZEMAX and standard-specific aberrations of the optimization algorithm, designed and optimized the optical structure. It works from 900 to 1 400 nm. The results of design analysis showed that with the light source slit width of 50 μm, the spectrophotometric system is superior to the theoretical resolution of 6 nm, and the size of the available spot is 0.042 mm×0.08 mm. Verification examples show that the design meets the requirements of the imaging regularity, and can be used for MOEMS mirror reflectance scan. And it was also verified that the use of a new MOEMS mirror array spectrometer model is feasible. Finally, analyze the relationship between the location of the detector and the maximum deflection angle of micro-mirror was analyzed.