半导体光电, 2011, 32 (1): 77, 网络出版: 2012-01-04
椭圆偏振仪测试非晶薄膜热光系数研究
Measurement of Thermo-optical Coefficient of Amorphous-Si Films by Ellipsometer
摘要
在椭圆偏振仪测量原理的基础上，采用Forouhi-Bloomer模型的参数匹配模型，分析非晶硅的物理性质，利用温度与禁带宽度间的关系，得到利用椭圆偏振仪测试非晶硅薄膜热光系数的方法与非晶硅热光系数的表达式，利用相关文献对其进行验证，验证结果表明，该方法是可行的。
Abstract
Based on the theory of ellipsometer, adopting the matching model of Forouhi-Bloomer model, the characteristics of α-Si were analyzed. Utilizing the relations between temperature and band gap, the measurement and the expression of thermo-optical coefficient of α-Si films were obtained.
陈伟, 刘爽, 曾璞, 刘永, 刘永智. 椭圆偏振仪测试非晶薄膜热光系数研究[J]. 半导体光电, 2011, 32(1): 77. CHEN Wei, LIU Shuang, ZENG Pu, LIU Yong, LIU Rongzhi. Measurement of Thermo-optical Coefficient of Amorphous-Si Films by Ellipsometer[J]. Semiconductor Optoelectronics, 2011, 32(1): 77.
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