以 ZnSe为基底设计了一种宽带红外分束镜, 透射和反射比为 50/50, 工作波长可达到 3～13 μm, 工艺实现采用了电子束蒸发物理气相沉积的方法, 薄膜材料仅含有 ZnSe和 Ge。利用了 Spectrum GX红外傅立叶变换光谱仪对该分束镜的透过率进行测量, 测试结果表明该分束镜的平均透过率约为 50%, 具有宽带的分束特性, 与设计结果基本相符。环境测试表明：薄膜具有良好的稳定性和牢固度。该分束器可以应用于可靠性要求比较高的环境中。

A wideband beamsplitter on ZnSe substrate was designed with reflectance to transmittance ratio of 50/50. The working spectrum is from 3 μm to 13 μm. The electron beam physical vapor deposition (EBPVD)method was used to fabricate the beamsplitter. Two types of infrared coating materials zinc selennide(ZnSe)and germanium(Ge)are used in this process. Spectrum GX infrared Fourior Transform spectrometer was used to measure the transmittance of the beamsplitter. The test result indicates that its average transmittance is about 50%. The beamsplitter has the wideband neutral beamsplitte character and the test result fits the design well. Measurement of stability and firmness indicates the coatings had good performance and the beamsplitter can be used in some rigour environment.