从设计优化算法和拟合方法两方面，研究了提高二元光学元件(BOE)激光束整形性能的方法。利用盖师贝格萨克斯通(GS)算法和平滑修正法相结合的混合算法以及改进的平滑修正法，在保持顶部均匀性的前提下提高了能量转换效率，在极坐标下得到了高质量的均匀圆光束和空心环形光束输出。研究了元件半径、采样点数和初始半径与拟合精度之间的关系。在Zemax中得到了合理的BOE相位结构，输出光束满足设计要求。

The quality of laser beam shaping is improved using binary optics element (BOE) in two ways：design algorithm and phase fitting method. In polar coordinates system, high quality flat-top beam is obtained by using profile-smoothing and Gerchberg-Saxton (GS) hybrid algorithm. In order to get annular output beam, an improved profile-smoothing algorithm is presented. These two algorithms can maintain high energy conversion efficiency without loss in uniformity. Besides, we research how the radius of BOE, sampling number and initial radius influence the phase fitting accuracy. The machinable BOE phase is obtained in Zemax. The evaluation index shows that the phase structure meets the design requirements.