中国激光, 2011, 38 (s1): s107004, 网络出版: 2012-01-06
光纤温度传感薄膜探头的设计与实验研究
Research and Design of a Fiber-Optic Temperature Sensing Film Probe
摘要
针对目前光纤温度传感器稳定性及抗干扰性差的问题,研究设计了一种新型光纤温度传感器探头。光纤温度传感薄膜探头是以锗为传感薄膜材料,探头结构采用了双层膜层叠结构,其中低折射率材料是二氧化硅,高折射率材料为锗。其探测原理是根据锗的折射率随温度变化而改变,从而导致了反射率的变化,在实际应用中,通过测量反射功率值达到测温的目的。光纤温度传感薄膜探头具有良好的线性特性,通过实验验证可以得到在测温范围为30 ℃~130 ℃时,其线性为99.85%。结果表明,得出的结论能够满足光纤温度传感器的线性化的目的。
Abstract
In order to solve nonlinear and unstable problem in measurement, a fiber-optic temperature sensing film probe was designed. The material of the sensing film probe is germanium. The sensing probe is a double-layered film structure, in which the low refractive index material is silicon dioxide and the high refractive index material is germanium. The detection principle is based on the changes of refractive index of germanium because of the temperature change, resulting in changes in the reflectivity. Practically, we can get the temperature figures by measuring the reflected power. The line linearization of the sensor, which was obtained over a temperature measurement range of 30 ℃~130 ℃ is 99.85%. The results show that the conclusion can meet the purpose of linearization of fiber temperature sensor.
胡佳惠, 陶春先, 张大伟, 黄元申, 倪争技. 光纤温度传感薄膜探头的设计与实验研究[J]. 中国激光, 2011, 38(s1): s107004. Hu Jiahui, Tao Chunxian, Zhang Dawei, Huang Yuanshen, Ni Zhengji. Research and Design of a Fiber-Optic Temperature Sensing Film Probe[J]. Chinese Journal of Lasers, 2011, 38(s1): s107004.