光学学报, 2012, 32 (3): 0318001, 网络出版: 2012-01-17
一种实现共焦显微镜空间微分成像的新方法
New Method of Spatial Differential Imaging with Confocal Microscope
摘要
提出了一种实现共焦显微镜空间微分成像的新方法。为了获得空间微分图像,首先利用时间分辨技术结合互补调制技术,获得两束相位相反的调制光,然后利用这两束相位相反的调制光结合共焦扫描技术,实现共焦显微镜的空间微分成像。实验表明:这种空间微分技术可以准确实现共焦显微镜的空间微分成像,从而获得成像物体的边缘轮廓和实现边缘增强。
Abstract
A new method for obtaining the spatial differential confocal microscopic image is presented. In order to realize spatial differential confocal microscopy, an optical complementary chopper is designed based on time-resolved technology to achieve the differential of signals. Combining with confocal scanning technology, using the different signals of confocal microscope the spatial differential confocal microscopic image is obtained. Through experiments, the rationality of the system is approved. The spatial differential confocal microscopic images of integrated circuit maskplate are measured on this system. The results show that the spatial differential confocal microscopy can gain edge profile of imaging objects and enhance image edge compared to the confocal microscopy.
张曼, 唐志列, 谭治良, 吴泳波, 廖燕菲, 郭利娜. 一种实现共焦显微镜空间微分成像的新方法[J]. 光学学报, 2012, 32(3): 0318001. Zhang Man, Tang Zhilie, Tan Zhiliang, Wu Yongbo, Liao Yanfei, Guo Lina. New Method of Spatial Differential Imaging with Confocal Microscope[J]. Acta Optica Sinica, 2012, 32(3): 0318001.