现代显示, 2012, 23 (1): 40, 网络出版: 2012-02-13
锂电池极片涂膜测厚仪设计及精度分析
Design of Lithium Pole Piece Film Thickness Measuring Instruments and Precision Analysis
摘要
文章设计了一种基于微处理器的电感测微仪,把这项技术应用在锂电池极片涂膜的厚度测量中,通过一系列的试验对该电感测微仪性能参数进行了评价。试验数据表明,该测量仪具有良好的性能指标,能在精密和超精密测量领域中使用。
Abstract
We designed a inductance micrometer based on the microprocessor, and we used the technology in the film thickness measurement about lithium batteries pole piece. Through a series of tests, we evaluated the inductance micrometer performance parameters. From the experimental data show that the measuring instrument has a good performance. It can be used in the field of precision and ultra-precision measurement.
杨宁, 杨永跃. 锂电池极片涂膜测厚仪设计及精度分析[J]. 现代显示, 2012, 23(1): 40. YANG Ning, YANG Yong-yue. Design of Lithium Pole Piece Film Thickness Measuring Instruments and Precision Analysis[J]. ADVANCED DISPLAY, 2012, 23(1): 40.