提出并研制了基于光纤SPR传感探针的新型湿敏传感器。 首先研究了光纤SPR传感探针对环境湿度变化的敏感特性, 在此基础上提出在光纤SPR传感探针表面增覆不同厚度且具有水分子吸附功能的PVA薄膜来实现环境相对湿度的监测。 研究结果表明, 增覆双层PVA薄膜的光纤SPR传感探针在高湿区具有较好监测效果, 其共振强度对应的相对湿度测量灵敏度达到1.59%/%RH, 较光纤SPR探针呈现显著提高。 而增覆单层PVA薄膜的光纤SPR传感探针在高湿区共振波长对应的相对湿度监测灵敏度达到2.411nm/%RH。 此外所提出的新型光纤SPR湿敏探针在PVA薄膜失效后经过特殊工艺处理仍可重复镀膜使用。

A new type of humidity sensor based on optical fiber SPR sensor probe was introduced and manufactured. Firstly the sensitivity of optical fiber SPR sensor probe to environment humidity was studied. On this basis, coating with thin PVA film of different thickness and with capacity of adsorbing water molecule on the surface of optical fiber SPR sensor probe, for the purpose of monitoring relative humidity was proposed. The research shows that the SPR sensor probe coated with double layers of thin PVA film gets better detection result, and humidity measurement sensitivity is 1.59%/%RH, being improved notably compared with SPR optical fiber probe. The SPR sensor coated with single layer of thin PVA film has relative humidity measuring sensitivity of 2.411 nm/%RH related to resonance wavelength in high humidity area. In addition, the new type of optical fiber humidity-sensitive probe with PVA film losing efficiency can be reusable after special treatment.