设计并制作了一种基于激光直写技术的光学触摸传感器件。该器件采用光学微流结构实现对外加压力的连续比例测量。器件制作采用紫外激光直写技术配合高精度平移台实现，整体工艺过程在3 min内完成。对所设计的传感器件的性能测试表明，光强信号随外力变化的曲线平滑，实测灵敏度为0.995 mV/kPa。同时设计并制作了基于传感单元的阵列结构，不仅消除了光学累积误差，而且对集成化触摸传感的应用具有优势。

A tactile sensor element is designed and fabricated based on laser direct writing technology. A continuous measurement of external tactile pressure is achieved by using an optical microfluidic structure. The tactile sensing element is fabricated using ultraviolet laser direct writing technology combining with a high-precision translation stage, and the overall process time is within 3 min. Experimental results show that the relation between external pressure and change in light intensity exhibits a smooth curve with a sensitivity of 0.995 mV/kPa. The array structure is designed and fabricated based on this sensing element, and it is capable of not only eliminating optical accumulated error, but also enhancing integration of optical tactile sensing into various applications.