根据超磁致伸缩构件精密加工异形孔刀具轨迹的特点，采用纯延时环节串联线性化模型，建立其在高频驱动下驱动电流与输出微位移的迟滞非线性动态模型。通过一定频率下驱动电流与输出位移的相关辨识，获得系统纯延时环节的补偿参数，并建立了驱动电流与无相位差输出位移的线性化模型。当实时控制时，通过迟滞非线性模型的直接逆模型补偿，使位移输出与异形孔的理想刀具轨迹一致。实验验证表明，直接逆模型的最大开环控制误差为2.7 μm，最大相对误差为10%。进一步对构件进行微位移反馈闭环控制，实验误差最大值为1.2 μm，最大相对误差为7%，提高了系统的控制精度。

According to the tool path characters of non-cylindrical hole precision machining by giant magnetostrictive components, a dynamic hysteresis model of giant magnetostrictive components was established by a pure delay transfer function and the linearity model between high-frequency driving currents and micro-displacement responses. The pure delay compensation parameters of the system were obtained by the relevant identification of driven currents and output displacements with a certain frequency. Then, a mapping model of the driven currents and output displacements without delay was established. The output displacement met the ideal tool paths of non-cylindrical hole boring by direct inverse model and delay compensation in real-time control. The results in verification experiments indicate that the maximum control error is 2.7 μm, and the maximum relative error is about 10%. By integration of micro-displacement feedback control,the accuracy of the component is improved further, the maximum control error is 1.2 μm, and the maximum relative error is about 7%.