中国光学, 2012, 5 (2): 93, 网络出版: 2012-04-13   

用于光电仪器和相关测量的自混合干涉技术(特邀)

Self-mixing interferometry used for instrumentations and measurements(invited)
作者单位
1 意大利帕维亚大学 电子系,伦巴第大区 帕维亚 27100,意大利
2 西安交通大学 机械工程学院,陕西 西安 710049
3 澳大利亚伍伦贡大学 电子、计算机及通讯工程学院,新南威尔士州 伍伦贡 2522,澳大利亚
摘要
回顾了一种全新结构的干涉仪—自混合干涉仪(SMI)的发展情况。SMI由于其在激光器外部无需任何光学元件且应用范围广泛而倍受关注。SMI可用于测量与光路长度有关的一些量(如位移、小幅度振动、速度),也可用于测量弱光的回波(即回波损耗和隔离因子的测量)并可表征与介质相互作用特性相关的物理参数(如激光线宽、相干长度以及α因子等)。SMI是一种相干探测方法,其工作在靠近接收场的量子极限处,目前对散射目标物的最小探测幅值可达20 pm/Hz甚至更高,使用角锥棱镜使其计数步长为半波长,在动态范围为2 m时其分辨率约为05 μm。另外,SMI结构紧凑、易于现场安装且可用于MEMS测试、旋转机械振动测试和生物运行测试等各种实验。
Abstract
This paper reviews the development of a new configuration of interferometry, Self-mixing Interferometry(SMI). SMI is attractive because it doesn′t require any optical part external to the laser and can be employed in a variety of measurements, ranging from the traditional measurements related to optical path length like displacements, small-amplitude vibrations, velocity; to sensing of weak optical echoes, like return loss and isolation factor measurements; and also to a special feature for the interaction with the medium, measurements of physical parameters, like laser line width, coherence length, and the alfa factor. Because it is also a coherent detection scheme, the SMI operation is close to the quantum limit of received field and the minimum detectable amplitudes of 20 pm/Hz or better are currently achieved upon operation on diffusive targets, whereas a corner cube allows half-wavelength counting mode or 05 μm resolution on a dynamic range up to 2 m. SMI has a compact setup, and is easy to deploy in the field and can interface a variety of experiments from MEMS testing to rotating machine vibration testing to pickup of biological motility as described in the paper.

DONATI Silvano, 王昭, 禹延光. 用于光电仪器和相关测量的自混合干涉技术(特邀)[J]. 中国光学, 2012, 5(2): 93. DONATI Silvano, WANG Zhao, YU Yan-guang. Self-mixing interferometry used for instrumentations and measurements(invited)[J]. Chinese Optics, 2012, 5(2): 93.

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