采用新型聚合物材料Norland紫外固化胶(NOA)制备了聚合物M-Z型热光开关器件。对NOA薄膜材料的光学性质进行了表征，采用感应耦合等离子体(ICP)方法制备出形貌良好的波导器件。测得在1 550 nm波长下，长22 cm的直波导插入损耗为83 dB。在电极上施加直流信号，测得热光开关的消光比为11 dB，驱动功率为85 mW。引入直流偏置网络，获得了器件的开关特性曲线，测得开关器件的上升时间为1085 ms，下降时间为4895 μs。实验结果表明:NOA材料在热光开关及其它聚合物光波导集成器件的制备中具有很大的应用潜力。

Norland Optical Adhesive(NOA), a new type of polymer material, is used to fabricate the Mach-Zehnder thermo-optic switch in this paper. The optical properties of NOA film materials are characterized. The waveguides with good profiles are fabricated by the Inductively Coupled Plasma(ICP) method. The insertion loss of a 22 cm-length straight waveguide is 83 dB at 1 550 nm. The extinction ratio of the thermo-optic switch is 11 dB and the driving power is 83 mW when the DC bias is loaded on the electrodes. The switching property of the device is tested with DC bias, and the rise time and the fall time of the switch are 1085 ms and 4895 μs, respectively. Experimental results show that the NOA material has great potentials in fabricating thermo-optic switches and other polymer waveguide integrated devices.