研究和发展了一种将微区拉曼（Raman）光谱检测与原子力显微镜（AFM）微纳米扫描成像相结合的新型Raman-AFM技术。 设计了Raman光谱与AFM扫描成像的原位检测探头； 研制出相应的Raman-AFM系统； 利用该系统， 对ZnO纳米颗粒和TiO2纳米薄膜开展了微区Raman光谱与微纳米结构的检测实验。 研究表明， 所获得的Raman光谱检测结果与理论值良好吻合， 同时， AFM扫描检测得到的图像很好地表征了样品的微纳米结构， 从而实现了微区Raman光谱与AFM图像的原位及同步检测， 验证了这一技术的可行性， 为Raman光谱技术与微纳米技术领域的实际应用提供了技术基础。

This paper proposes a novel technique of Raman-atomic force microscopy (AFM) combining micro region Raman spectroscopy and AFM imaging. An in-situ probe unit which can simultaneously realize the detection of Raman spectrum and the measurement of AFM image was designed, and a related Raman-AFM system was constructed. Using this system, some experiments were carried out to acquire micro region Raman spectra and AFM images of ZnO nano-particle and TiO2 film. The results show that the Raman spectra of both samples are in agreement with theoretical vaues, and the AFM images represent their micro/nano-structures quite well. These researches prove the feasibility of the Raman-AFM technique which has the potential of being widely applied in the fields of Raman spectroscopy and micro/nano-technology.