将具有蜂窝内壁结构的遮光罩内的杂散光传播分解为蜂窝结构的散射、内壁等效面传播两个层次的行为。通过建立蜂窝结构的等效面各向异性反射模型，采用蒙特卡罗法模拟获得内壁等效面的双向反射分布函数(BRDF)。以此为基础，再次采用蒙特卡罗法模拟遮光罩内壁等效面的杂散光传播过程，分析了该类遮光罩的杂散光抑制特性，并讨论了蜂窝高度和涂层反射率的影响。结果表明，遮光罩内壁蜂窝结构有很好的杂散光抑制作用；蜂窝高度与边长之比δ≥1时，遮光罩的抑制能力不再变化，降低涂层反射率能够有效地增强抑制效果。

Stray light propagation in the baffle with honeycombed wall is divided into two levels, the scattering inside honeycomb structures and the transmission by the equivalent surface of inner wall. An anisotropic reflection model is established to predict the bidirectional reflectance distribution function (BRDF) data of the surface. By simulating the stray light propagation with the Monte-Carlo method, the suppression property of the baffle and the effects of coating reflectivity and geometric parameter of honeycomb are investigated. The results show that the baffle with honeycombed wall has a good performance of stray light suppression, and lower reflectivity of coating can enhance the performance.