激光与光电子学进展, 2012, 49 (8): 080006, 网络出版: 2012-05-07
并行共焦显微检测技术及其研究进展 
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Parallel Confocal Microscopic Detection Technique and Its Research Progress
显微术 并行共焦显微术 微纳检测 数字微镜 静态扫描 microscopy parallel confocal microscopy micro-nano detection digital micromirror device (DMD) static scanning
摘要
共焦显微术是一种重要的微小物体成像技术，由于具有高精度、高分辨率及容易实现三维重构图像的优势而被广泛应用于微纳三维形貌测量。近年来，并行共焦显微检测技术引起各国专家的广泛关注，该技术将单点扫描变为多路同时并行探测，大大提高了三维检测速度。综述了并行共焦显微检测技术的基本原理，系统论述了近年来国内外在并行共焦显微检测技术方面的研究进展以及作者在这方面的研究。按照实现并行检测的方法对7种并行共焦显微检测技术进行了分类介绍，并指出了各种方法的优缺点。最后总结了目前存在的技术难题，分析了未来的发展趋势，为我国进一步开展此项研究提供技术参考。
Abstract
Confocal microscopy is an important imaging technique for micro structure, and it is widely used in micro-nano three-dimensional (3D) topographic measurement due to its high precision, high resolution and ease of use to realize 3D image reconstruction. In recent years, parallel confocal microscopy has attracted extensive attention of the worldwide experts. This technology substitutes a single point scanning pattern for synchronously multiple-beam parallel detection, greatly improving the 3D testing speed. The basic principle and the worldwide research progress of parallel confocal microscopy are reviewed and the author′s research in the field is briefly introduced. Introduction to seven categories is presented according to the parallel detection methods of parallel confocal microscopy, and the advantages and disadvantages of each type are pointed out. Finally, the existing technical difficulties are summarized and the development trend is analyzed to provide technical reference for further research in China.
涂龙, 余锦, 樊仲维, 边强, 葛文琦, 刘洋, 张雪, 黄科, 聂树真, 李晗, 貊泽强. 并行共焦显微检测技术及其研究进展[J]. 激光与光电子学进展, 2012, 49(8): 080006. Tu Long, Yu Jin, Fan Zhongwei, Bian Qiang, Ge Wenqi, Liu Yang, Zhang Xue, Huang Ke, Nie Shuzhen, Li Han, Mo Zeqiang. Parallel Confocal Microscopic Detection Technique and Its Research Progress[J]. Laser & Optoelectronics Progress, 2012, 49(8): 080006.
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