500 kV全固态Marx发生器采用Z型电路结构，以28个最大工作电压达22 kV、满载最高连续重复运行频率达200 Hz的绝缘栅双极型晶体管组件作为脉冲控制开关，采用以金属化膜电容器和线绕电感构成的梯形脉冲形成网络作为储能和脉冲形成器件。目前已实现500 kV脉冲输出，在50 Hz的重复频率下实现数十个脉冲的猝发输出。该发生器的输出脉冲电压峰值与已有文献报道的最高功率固态Marx发生器技术指标相近，输出脉冲电流峰值提高1倍，达到1000 A，发生器输出脉冲功率峰值达到500 MW。在采用电容器作为储能元件时，此Marx发生器输出脉冲宽度可在3～10 μs范围内连续调整。

The paper presents a 500 kV all-solid-state Marx generator adopting Z type circuit. In this Marx generator, twenty-eight isolated gate bipolar transistors(IGBTs) serial modules were utilized as controllable switches. The maximum working voltage of each IGBTs module was designed as high as 22 kV, and the repetition rate at full load condition was designed as high as 200 Hz. The ladder type pulse-forming-networks (PFNs) consisting of metallized film capacitors and wound inductors were designed as energy storage and pulse-forming components. Experimental results indicate that the Marx generator can run with 500 kV output pulses and 50 Hz repetition rate in burst-mode successfully. The peak output pulse voltage of this generator is approximately the same as that of the highest power solid-state Marx generator ever reported, while the peak current is almost twice, reaching 1 000 A. The maximum pulsed power of the generator is as high as 500 MW. As the capacitors were utilized as energy storage components, the pulse width can be adjusted from 3 μs to 10 μs continuously.