强激光与粒子束, 2012, 24 (5): 1098, 网络出版: 2012-05-22
软X射线KBA显微镜分辨力及其影响因素
Soft X-ray KBA microscope resolution and its influencing factors
KBA显微镜 分辨力 几何像差 衍射效应 表面粗糙度 KBA microscope resolution geometrical aberration diffractive effect surface roughness
摘要
为了对KBA显微镜的分辨能力进行准确计算,对KBA显微镜的分辨力和影响因素进行了研究,分析了衍射效应、几何像差、面形误差和粗糙度等因素对分辨力的影响,以此为基础建立了KBA显微镜的分辨力计算模型,并模拟了KBA显微镜的分辨力与视场的关系。用KBA显微镜获得了2.5 keV能量的X射线成像结果,中心视场范围的分辨力约为6 μm。通过实验结果与模型模拟的对比,可得建立的模型对KBA显微镜分辨力与视场尺寸的关系的描述与实际测试的结果基本符合,并对不完善之处进行了分析。
Abstract
The paper investigates the resolution of soft X-ray KBA microscope and analyzes its influencing factors, including diffractive effect, geometrical aberration, slope error and surface roughness of specula. A calculation model of the KBA microscope is obtained according to these analyses. A 2.5 keV X-ray imaging experiment is performed and the resolution agrees with the simulated data of the model in large visual field. The incompleteness of this model is also analyzed.
黎宇坤, 董建军, 曹柱荣. 软X射线KBA显微镜分辨力及其影响因素[J]. 强激光与粒子束, 2012, 24(5): 1098. Li Yukun, Dong Jianjun, Cao Zhurong. Soft X-ray KBA microscope resolution and its influencing factors[J]. High Power Laser and Particle Beams, 2012, 24(5): 1098.