采用单点金刚石车削技术制备加工铝楔形靶，发现金刚石车削加工楔形靶实际轮廓为圆锥面。通过Veeco NT1100白光干涉仪对表面轮廓及粗糙度进行了测量，结果表明平面部分表面粗糙度小于50 nm，最大峰谷值小于100 nm,斜面部分表面粗糙度小于200 nm。分析认为斜面部分粗糙度测量数值较大是由刀具工作角度变化导致的，而测量轮廓线非圆锥体母线又导致粗糙度测量结果大于实际值。

The aluminum wedge target was produced by diamond turning technology. The actual profile of the wedge target’s inclined surface is found to be a conical one. The surface roughness was characterized by Veeco NT1100 white light interferometer. The results indicate that the surface root-mean-square roughness of the plane part is less than 50 nm and the maximum peak-to-valley height there is less than 100 nm. The surface roughness of the inclined part is less than 200 nm. The larger measurement value of roughness appearing at the inclined part can be explained by the following two reasons: one is the variation of working angles of tool, which increases the roughness, the other is that the measurement profile is not the generatrix of cone, which enlarges the measurement results.