针对强激光能源系统对Marx触发器的输出性能和可靠性要求，介绍了一种六级的Marx触发器。通过采用多级低电感脉冲形成电路获得了高幅值、陡前沿的输出脉冲，运用实验与概率分析相结合的方法，确定了它的工作参数。实验研究结果表明：这种Marx触发器的误触发率和触发气体开关成功率均符合两参数的威布尔概率分布；当欠压比为65%、工作电压为13.5 kV、工作气压(绝压)为0.35 MPa时，能输出幅值120 kV、前沿20 ns的电压脉冲;该触发器能同时满足误触发率低于0.000 1%，正常触发成功率高于99.999 9%的技术要求。经过长时间现场运行测试，Marx触发器工作良好，无异常现象。

In order to trigger the two-electrode gas switch without a trigger electrode, not only a high magnitude, fast rise time output pulse is needed but also high reliability is required for the switch trigger in high power system. A six-stage Marx trigger was introduced to solve the above technical and reliability problems. A pulse voltage with fast rise time and high magnitude was obtained by establishing a multi-stage pulse forming circuit and the operating parameters were determined by the method combining experiment measurement with probability model analysis. The results demonstrate that, both the self-trigger rate of Marx trigger and the success rate of triggering gas switch accord with the two-parameter Weibull distribution model established based on experimental data. The output voltage’s magnitude can reach 120 kV and rise time is less than 20 ns, when the under-voltage ratio is 65%, the operating voltage is 13.5 kV, and the absolute gas pressure is 0.35 MPa. The calculated self-trigger rate is less than 0.000 1% and the calculated success rate of triggering gas switch is higher than 99.999 9%.