中国激光, 2012, 39 (s1): s108011, 网络出版: 2012-05-28  

基于自准直原理的小视场镜头波像差测试系统

Wave Aberration Measuring System of Optical Lens with Small-Field of View Based on Auto-Collimating Principle
作者单位
1 中国科学院西安光学精密机械研究所, 陕西 西安 710119
2 中国科学院研究生院, 北京 100049
摘要
为实现对小视场光学镜头波像差的快速、高精度检测,将自准直原理与斐索型激光球面干涉仪检测波像差原理结合起来,提出一种基于自准直原理的光学镜头波像差检测系统。介绍了斐索型激光球面干涉仪检测波像差的工作原理,并详细论述了基于自准直原理的波像差检测系统的装调及检测方法。结合自准直光路的特点,实现对干涉仪光轴、被测光学镜头光轴以及高精度平面反射镜光轴的精确定轴,从而实现了系统光路的快速装调。实验证明,此系统可有效解决小视场光学镜头在波像差检测过程中的光轴偏斜问题,实现小视场光学镜头波像差快速、准确的检测。
Abstract
In order to measure the wave aberration of optical lens with small field of view rapidly and precisely, a new wave aberration measuring system based on both auto-collimation principle and Fizeau spherical laser interferometer measurement principle is described. The wave aberration measurement principle by Fizeau spherical laser interferometer is introduced. The assembling and measuring methods of this new auto-collimation-based wave aberration system are discussed and analyzed in detail. By using the characteristic of auto-collimation optics, the in-terferometer′s axis, the optical lens′s optical axis and the high-precision reflector′s axis are precisely determined, and the fast assembly of the optical system is implemented too. Analyses reveal that this system can be an effective solution to the optical axis deviation problem in measuring the wave aberration of optical lens with small-field of view, and implementing the wave aberration test of optical lens rapidly and accurately.

张学敏, 魏儒义, 李华, 段嘉友, 杨建峰. 基于自准直原理的小视场镜头波像差测试系统[J]. 中国激光, 2012, 39(s1): s108011. Zhang Xuemin, Wei Ruyi, Li Hua, Duan Jiayou, Yang Jianfeng. Wave Aberration Measuring System of Optical Lens with Small-Field of View Based on Auto-Collimating Principle[J]. Chinese Journal of Lasers, 2012, 39(s1): s108011.

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