光电工程, 2012, 39 (5): 7, 网络出版: 2012-05-31
基于 SPR的多层金属膜厚在线纳米测量
Online Nanomeasurement of Multilayer
表面等离子体振荡 柱面光 多层金属薄膜 在线测量 surface plasma resonance cylindrical light multilayer metal films online measurement
摘要
通过对于首层金属膜的 SPR反射光强曲线的分析利用两峰值点标记角度,同时用柱面光与 CCD测量系统建立无机械测角转台的反射光强角度分布测量系统。根据 CCD接收的光强与位置对应信息经计算机处理换算为光强角度分布曲线,并通过与库内的曲线数据进行匹配而获得膜厚数值。利用该系统对铬钛银铝等常用金属薄膜进行了在线测控研究,得到了纳米级金属薄膜的膜层蒸镀顺序与相应的膜厚测量范围。Metal Films Thickness Based on SPR
Abstract
Through analyzing the SPR reflected light intensity curve of first metal film, the two peak points on the curve are used to mark angle, and the cylindrical light and CCD are utilized to establish measurement system of reflected lightintensity of angle distribution without mechanical turntable. The information between light intensity and pixel position detected by CCD is calculated to get the curve of reflected light intensity of angle distribution by computer, and the thickness of film can be obtained through matching the curve data of database. The films of common metal as Cr, Ti, Al and Ag are used to online measure by utilizing this measurement system, and the coating sequence and the corresponding online measurement range of nanometer metal films can be obtained.
李艳敏, 李孟超, 刘芳芳, 金丹, 张大伟, 庄松林. 基于 SPR的多层金属膜厚在线纳米测量[J]. 光电工程, 2012, 39(5): 7. LI Yan-min, LI Meng-chao, LIU Fang-fang, JIN Dan, ZHANG Da-wei, ZHUANG Song-lin. Online Nanomeasurement of Multilayer[J]. Opto-Electronic Engineering, 2012, 39(5): 7.