分析了不同预处理方式下缺陷上的激光能量的覆盖特点。理论分析表明，相同预处理效率下，单步预处理缺陷上激光能量覆盖率优于多步预处理。实验研究了电子束蒸发制备的HfO2/SiO2多层高反膜的激光预处理，结果发现单步预处理后薄膜的单脉冲激光损伤阈值比相同效率的4步预处理后薄膜的单脉冲激光损伤阈值要好。采用最高能量密度为112%激光损伤阈值的5步预处理后，光学薄膜的激光损伤阈值提高了83.5%。

The laser energy covering the defect in laser-conditioning process is studied, and its characteristics in different laser-conditioning processes are analyzed. Theoretical analysis shows that, with the same conditioning efficiency, the laser energy coverage rate of single-step conditioning is better than that of multi-step conditioning. From laser-conditioning experiments of the HfO2/SiO2 high reflective coating deposited by E-beam evaporation, we know that the LIDT (laser-induced damage threshold) enhancement of the coating after single-step conditioning is better than that of the coating after multi-step conditioning with the same conditioning efficiency. Using the highest irradiating energy of 112%E0, the LIDT of coating after 5-step conditioning is 183.5% of that before conditioning.