光谱学与光谱分析, 2012, 32 (6): 1717, 网络出版: 2012-06-14
面向微小型紫外光谱仪的凹面光栅模拟与设计
Design of Concave Grating for Ultraviolet-Spectrum
紫外光谱 衍射效率 凹面光栅 ultraviolet-spectrum diffractive efficiency Concave Grating ZEMAX ZEMAX PCGrate PCGrate
摘要
针对微型紫外光谱仪设计要求, 基于凹面光栅理论与方法开展了微小型紫外光谱仪的像差分析, 完成平场化凹面光栅的模拟分析与设计, 解决了紫外宽光谱与高分辨率问题, 同时应用光栅衍射理论、 全息光学理论, 采用光栅设计软件PCGrate对凹面光栅的衍射效率进行了设计和优化, 使所应用级次的光谱衍射效率在整个设计波段内达到最优, 实现了微小型紫外光谱仪的平场凹面光栅设计。 所设计紫外凹面光栅工作波长范围190~410 nm、 口径20 mm, F/#=0.21。 按照设计参数装调的微型紫外光谱仪在宽度为50 μm缝光源再现情况下, 光谱分辨率优于3 nm, 衍射效率无异常出现。
Abstract
Ultraviolet-spectrum technology is a kind of low signal and multianalysis technology. For taking full advantage of spectral information and reducing the volume of spectrometer, we used high efficiency spectroscopy structure based on concave grating. Based on concave grating theory and optic design software ZEMAX, a flat field concave grating for ultraviolet spectrophotometer was designed from primary structure, which relied on global optimization of the software. The contradiction between wide spectrum bound and limited spectrum extension was resolved, aberrations were reduced successfully, spectrum information was utilized fully, and the optic structure of spectrometer was highly efficient. For better preference of this spectrophotometer, after get the structure parameter, combine grating fabrication condition with practice working condition, grating diffractive theory, holographic optics theory and software PCGrate was used for diffraction efficiency design and improve. A paradigm of flat field concave grating is given, it works between 190 nm to 410 nm, the diameter of the concave grating is 20 mm, and F/# is 0.21. The design result was analyzed and evaluated. It was showed that if the slit source, whose width is 50μm, is used to reconstruction, the theoretic resolution capacity is better than 3 nm.
罗彪, 温志渝, 温中泉, 曾甜玲. 面向微小型紫外光谱仪的凹面光栅模拟与设计[J]. 光谱学与光谱分析, 2012, 32(6): 1717. LUO Biao, WEN Zhi-yu, WEN Zhong-quan, ZENG Tian-ling. Design of Concave Grating for Ultraviolet-Spectrum[J]. Spectroscopy and Spectral Analysis, 2012, 32(6): 1717.