压电陶瓷微动台的迟滞非线性严重影响其动态定位精度，为了解决这一问题，采用一种改进的PI模型对微动台的迟滞非线性进行了建模。为了提高传统PID算法对压电陶瓷微动台的动态定位性能，将改进的PI模型与传统PID算法组合构成前馈复合控制算法，并进行了微动台的慢速与快速动态定位实验。结果表明，对同频曲线定位时，前馈PID复合算法的最大误差为传统PID算法的40%左右，平均误差为传统算法的20%~30%左右；对多频曲线定位时，前馈PID复合算法的最大误差和平均误差为传统PID算法的33%左右。数据表明前馈PID复合算法的动态定位性能明显优于传统PID算法。

As the nonlinear hysteresis of a piezoelectric ceramic positioning stage affects its dynamic positioning precision badly, this paper proposes a model for the piezoelectric ceramic hysteresis based on a modified PI hysteresis model. In order to improve the dynamic positioning precision of the piezoelectric ceramic positioning stage based on traditional PID algorithm, the feed-forward control is constituted with the modified PI inverse hysteresis model and a traditional PID, and the experiments on slow speed and high speed positionings are performed. Experimental results show that the maximal error and mean error of the feed-forward controller are 40% and 20%-30% that of traditional PID algorithm for tracking single frequency trajectory.For multi-frequency trajectory tracking,the feed-forward controller has better dynamic control effect, and both maximal error and mean error are almost 33% that of traditional one.These data indicate the availability of the feed-forward control algorithm.