激光与光电子学进展, 2012, 49 (9): 090602, 网络出版: 2012-07-13
基于SOI的2×2 MMI耦合器的设计 
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Design of a 2×2 MMI Coupler Based on SOI
摘要
设计了一种可用于阵列波导光栅(AWG)解调集成微系统的绝缘体上硅(SOI)基2×2多模干涉(MMI)耦合器，用光束传播法(BPM)对MMI耦合器进行了模拟。耦合器输入/输出波导采用倒锥形，多模干涉区尺寸为6 μm×57 μm。在TE偏振中心波长为1.55 μm时，器件附加损耗为0.46 dB，不均匀性为0.06 dB。在1.49~1.59 μm波长范围内耦合器的附加损耗小于1.55 dB。仿真结果表明所设计的2×2 MMI耦合器体积小、附加损耗低、波长响应范围宽、分光均匀，符合片上集成系统的要求。
Abstract
We design the 2×2 multimode interference (MMI) coupler based on silicon-on-insulator (SOI), which can be used in the array waveguide grating (AWG) demodulation integration microsystem. The coupler is simulated using the beam propagation method (BPM). Taper waveguides are used as input/output waveguides. The footprint of the MMI regions is only 6 μm×57 μm. The excess loss is 0.46 dB and the uniformity is 0.06 dB with TE polarization when the center wavelength is 1.55 μm. The maximum excess loss is 1.55 dB in the range of 1.49~1.59 μm. The simulation results show that the 2×2 MMI coupler with small size exhibits low excess loss, wide bandwidth and good uniformity, which can meet the requirement of system on chip.
董夏叶, 李鸿强, 陈弘达, 李恩邦, 柳智慧, 魏可嘉. 基于SOI的2×2 MMI耦合器的设计[J]. 激光与光电子学进展, 2012, 49(9): 090602. Dong Xiaye, Li Hongqiang, Chen Hongda, Li Enbang, Liu Zhihui, Wei Kejia. Design of a 2×2 MMI Coupler Based on SOI[J]. Laser & Optoelectronics Progress, 2012, 49(9): 090602.
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